Pulsed Laser Deposition
The excimer laser can be used as a means of vaporizing target material inside a vacuum chamber and depositing it on a substrate. The process has several advantages over conventional processes including;
- A wide variety of targets can be used; metals, ceramics and oxydes
- Independant control on the deposition temperature and the background pressure (oxygen, helium, nitrogen...).
- the resulting thin film has the same stochiometry as the target
- novel coatings such as diamond films can be produced
See our IPEX PLD Series Brochure for more information on the LightMachinery IPEX PLD Series Lasers